# Journal of Micro/Nanolithography MEMS and MOEMS

**Type:** Journals  
**Canonical URL:** https://scholariq.org/journals/journal-of-micro-nanolithography-mems-and-moems/

## Facts

| Field | Value |
| --- | --- |
| Citations | 17,765 |
| h-index | 48 |
| Open Access | false |
| ISSN-L | 1537-1646 |
| ISSNs | 1537-1646,1932-5134,1932-5150 |
| OpenAlex ID | https://openalex.org/S205064806 |
| Publisher | SPIE |
| Works | 1,675 |

## Journal papers

- [Deep learning-based detection, classification, and localization of defects in semiconductor processes](https://scholariq.org/papers/deep-learning-based-detection-classification-and-localization-of-defects-in/)

## Journal top topics

Showing 8 of 21.

- [Advancements in Photolithography Techniques](https://scholariq.org/topics/advancements-in-photolithography-techniques/)
- [Nanofabrication and Lithography Techniques](https://scholariq.org/topics/nanofabrication-and-lithography-techniques/)
- [Integrated Circuits and Semiconductor Failure Analysis](https://scholariq.org/topics/integrated-circuits-and-semiconductor-failure-analysis/)
- [Electron and X-Ray Spectroscopy Techniques](https://scholariq.org/topics/electron-and-x-ray-spectroscopy-techniques/)
- [Advanced MEMS and NEMS Technologies](https://scholariq.org/topics/advanced-mems-and-nems-technologies/)
- [Advanced Surface Polishing Techniques](https://scholariq.org/topics/advanced-surface-polishing-techniques/)
- [Photonic and Optical Devices](https://scholariq.org/topics/photonic-and-optical-devices/)
- [Mechanical and Optical Resonators](https://scholariq.org/topics/mechanical-and-optical-resonators/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.