# Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

**Type:** Journals  
**Canonical URL:** https://scholariq.org/journals/journal-of-vacuum-science-and-technology-a-vacuum-surfaces-and-films/

## Facts

| Field | Value |
| --- | --- |
| Open Access | false |
| ISSN-L | 0734-2101 |
| ISSNs | 0734-2101,1520-8559 |
| OpenAlex ID | https://openalex.org/S4210190837 |
| Publisher | American Institute of Physics |

## Journal papers

- [Mechanisms for hydrophilic/hydrophobic wetting transitions on cellulose cotton fibers coated using Al2O3 atomic layer deposition](https://scholariq.org/papers/mechanisms-for-hydrophilic-hydrophobic-wetting-transitions-on-cellulose-cotton/)
- [Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties](https://scholariq.org/papers/aluminum-oxide-titanium-dioxide-nanolaminates-grown-by-atomic-layer-deposition/)
- [Model for a multiple-step deep Si etch process](https://scholariq.org/papers/model-for-a-multiple-step-deep-si-etch-process/)
- [Microscratch testing method for systematic evaluation of the adhesion of atomic layer deposited thin films on silicon](https://scholariq.org/papers/microscratch-testing-method-for-systematic-evaluation-of-the-adhesion-of-atomic/)
- [Characterization of low dielectric constant plasma enhanced chemical vapor deposition fluorinated silicon oxide films as intermetal dielectric materials](https://scholariq.org/papers/characterization-of-low-dielectric-constant-plasma-enhanced-chemical-vapor/)
- [Atmospheric pressure microwave plasma for aluminum surface cleaning](https://scholariq.org/papers/atmospheric-pressure-microwave-plasma-for-aluminum-surface-cleaning/)
- [Ultrafine silicon quantum wires fabricated by selective chemical etching and thermal oxidation](https://scholariq.org/papers/ultrafine-silicon-quantum-wires-fabricated-by-selective-chemical-etching-and/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.