# Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

**Type:** Journals  
**Canonical URL:** https://scholariq.org/journals/journal-of-vacuum-science-and-technology-b-microelectronics-and-nanometer/

## Facts

| Field | Value |
| --- | --- |
| Open Access | false |
| ISSN-L | 1071-1023 |
| ISSNs | 1071-1023,1520-8567 |
| OpenAlex ID | https://openalex.org/S4210169477 |
| Publisher | American Institute of Physics |

## Journal papers

- [Sub-10 nm electron beam lithography using cold development of poly(methylmethacrylate)](https://scholariq.org/papers/sub-10-nm-electron-beam-lithography-using-cold-development-of-poly/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.