# Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena

**Type:** Journals  
**Canonical URL:** https://scholariq.org/journals/journal-of-vacuum-science-and-technology-b-microelectronics-processing-and/

## Facts

| Field | Value |
| --- | --- |
| Open Access | false |
| ISSN-L | 0734-211X |
| ISSNs | 0734-211X,2327-9877 |
| OpenAlex ID | https://openalex.org/S4210191927 |
| Publisher | AIP Publishing |

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.