# Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

**Type:** Journals  
**Canonical URL:** https://scholariq.org/journals/journal-of-vacuum-science-and-technology-b-nanotechnology-and-microelectronics/

## Facts

| Field | Value |
| --- | --- |
| Open Access | false |
| ISSN-L | 2166-2746 |
| ISSNs | 2166-2746,2166-2754 |
| OpenAlex ID | https://openalex.org/S4210235835 |

## Journal papers

- [Ultraviolet curable branched siloxanes as low-k dielectrics for imprint lithography](https://scholariq.org/papers/ultraviolet-curable-branched-siloxanes-as-low-k-dielectrics-for-imprint/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.