# Journal of Vacuum Science and Technology

**Type:** Journals  
**Canonical URL:** https://scholariq.org/journals/journal-of-vacuum-science-and-technology/

## Facts

| Field | Value |
| --- | --- |
| Open Access | false |
| ISSN-L | 0022-5355 |
| ISSNs | 0022-5355,2331-1754 |
| OpenAlex ID | https://openalex.org/S52593085 |
| Publisher | American Institute of Physics |

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.