# Microelectronic Engineering

**Type:** Journals  
**Canonical URL:** https://scholariq.org/journals/microelectronic-engineering/

## Facts

| Field | Value |
| --- | --- |
| Open Access | false |
| ISSN-L | 0167-9317 |
| ISSNs | 0167-9317,1873-5568 |
| OpenAlex ID | https://openalex.org/S158028765 |
| Publisher | Elsevier BV |

## Journal papers

- [Reduction of pattern peeling in step-and-flash imprint lithography](https://scholariq.org/papers/reduction-of-pattern-peeling-in-step-and-flash-imprint-lithography/)
- [A review of high-voltage integrated power device for AC/DC switching application](https://scholariq.org/papers/a-review-of-high-voltage-integrated-power-device-for-ac-dc-switching-application/)
- [OFETs with sub-100nm channel length fabricated by wafer-scale NIL and comprehensive DC and AC characterizations](https://scholariq.org/papers/ofets-with-sub-100nm-channel-length-fabricated-by-wafer-scale-nil-and/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.