# Plasma Sources Science and Technology

**Type:** Journals  
**Canonical URL:** https://scholariq.org/journals/plasma-sources-science-and-technology/

## Facts

| Field | Value |
| --- | --- |
| Open Access | false |
| ISSN-L | 0963-0252 |
| ISSNs | 0963-0252,1361-6595 |
| OpenAlex ID | https://openalex.org/S57082650 |
| Publisher | IOP Publishing |

## Journal papers

- [Mechanical properties of cubic boron nitride film on Si prepared by ECR plasma](https://scholariq.org/papers/mechanical-properties-of-cubic-boron-nitride-film-on-si-prepared-by-ecr-plasma/)

---
Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.