# 14nmゲートCMOS技術 : poly-SiGe ゲート電極、及びNiSiを用いた低温プロセスによる性能向上

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/14nm-cmos-poly-sige-nisi/

## Facts

| Field | Value |
| --- | --- |
| Author Names | 明 外園,和也 大内,万里子 高柳,由美 渡辺,俊幸 馬越,善光 加藤,敬 清水,伸二 森,英樹 小熊,俊行 佐々木,尚郎 吉村,清孝 宮野,信昭 安武,裕之 須藤,甘奈 安達,大伸 福井,健 渡辺,直樹 玉置,義明 豊島,秀美 石内 |
| Citations | 0 |
| Fields | Engineering,Social Sciences |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W128722757 |
| Type | article |
| Year | 2003 |

## Paper authors

- [裕之 須藤](https://scholariq.org/researchers/a5025120713/)

## Paper journal

- [電気学会研究会資料. EDD, 電子デバイス研究会](https://scholariq.org/journals/edd/)

## Paper primary topic

- [Military Technology and Strategies](https://scholariq.org/topics/military-technology-and-strategies/)

## Paper topics

- [Military Technology and Strategies](https://scholariq.org/topics/military-technology-and-strategies/)
- [Legal and Regulatory Analysis](https://scholariq.org/topics/legal-and-regulatory-analysis/)
- [Linguistic, Cultural, and Literary Studies](https://scholariq.org/topics/linguistic-cultural-and-literary-studies/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.