# 1D ResNet for Fault Detection and Classification on Sensor Data in Semiconductor Manufacturing

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/1d-resnet-for-fault-detection-and-classification-on-sensor-data-in-semiconductor/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Philip Tchatchoua,Guillaume Graton,Mustapha Ouladsine,Julien Muller,Abraham Traoré,Michel Juge |
| Citations | 14 |
| DOI | 10.1109/iccad55197.2022.9853997 |
| Fields | Computer Science,Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W4293093507 |
| Type | conference-paper |
| Year | 2022 |

## Paper authors

- [Michel Juge](https://scholariq.org/researchers/michel-juge/)

## Paper primary topic

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)

## Paper topics

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)
- [Fault Detection and Control Systems](https://scholariq.org/topics/fault-detection-and-control-systems/)
- [Anomaly Detection Techniques and Applications](https://scholariq.org/topics/anomaly-detection-techniques-and-applications/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.