# A 10nm high performance and low-power CMOS technology featuring 3<sup>rd</sup> generation FinFET transistors, Self-Aligned Quad Patterning, contact over active gate and cobalt local interconnects

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/a-10nm-high-performance-and-low-power-cmos-technology-featuring-3-sup-rd-sup/

## Facts

| Field | Value |
| --- | --- |
| Author Names | C. Auth,A. Aliyarukunju,M. Asoro,D. Bergstrom,Vinay Bhagwat,Jacquelyn Birdsall,Nabhendra Bisnik,Markus J. Buehler,V. Chikarmane,G. Ding,Qin Fu,Hector Gomez,Woo-Jin Han,Dennis G. Hanken,M. Haran,M. Hattendorf,R. Heussner,Hidenori Hiramatsu,Byron Ho,S. Jaloviar,Ik Kyeong Jin,Saurabh Joshi,Steven D. Kirby,Satyanarayana Kosaraju,H. Kothari,G. Leatherman,K. Lee,J. Leib,Advait Madhavan,K. Marla,H.‐G. Meyer,T. Mule,C. Parker,Srinivasan Parthasarathy,C. Pelto,Leonard C. Pipes,I. Post,M. B. Prince,Anisur Rahman,Saravanan Rajamani,Aloke Saha,Joana D. Santos,Monika Sharma,Vikrant Sharma,Jung H. Shin,Pankaj Sinha,Patrick M. Smith,M. Sprinkle,A. St. Amour,Chad Staus,Rahul Suri,D. J. Towner,Awnish Kumar Tripathi,Ahmet Tura,C. M. Ward,A. Yeoh |
| Citations | 372 |
| DOI | 10.1109/iedm.2017.8268472 |
| Fields | Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2787310733 |
| Type | conference-paper |
| Year | 2017 |

## Paper authors

- [Vikrant Sharma](https://scholariq.org/researchers/vikrant-sharma/)

## Paper primary topic

- [Advancements in Semiconductor Devices and Circuit Design](https://scholariq.org/topics/advancements-in-semiconductor-devices-and-circuit-design/)

## Paper topics

- [Semiconductor materials and devices](https://scholariq.org/topics/semiconductor-materials-and-devices/)
- [Advancements in Semiconductor Devices and Circuit Design](https://scholariq.org/topics/advancements-in-semiconductor-devices-and-circuit-design/)
- [Thin-Film Transistor Technologies](https://scholariq.org/topics/thin-film-transistor-technologies/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.