# A Deep Learning Model for Robust Wafer Fault Monitoring With Sensor Measurement Noise

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/a-deep-learning-model-for-robust-wafer-fault-monitoring-with-sensor-measurement/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Hoyeop Lee,Youngju Kim,Chang Ouk Kim |
| Citations | 113 |
| DOI | 10.1109/tsm.2016.2628865 |
| Fields | Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2553245249 |
| Type | article |
| Year | 2016 |

## Paper authors

- [Chang Ouk Kim](https://scholariq.org/researchers/chang-ouk-kim/)

## Paper primary topic

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)

## Paper topics

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)
- [Fault Detection and Control Systems](https://scholariq.org/topics/fault-detection-and-control-systems/)
- [Integrated Circuits and Semiconductor Failure Analysis](https://scholariq.org/topics/integrated-circuits-and-semiconductor-failure-analysis/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.