# A Digital Twin Framework With Bayesian Optimization and Deep Learning for Semiconductor Process Control

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/a-digital-twin-framework-with-bayesian-optimization-and-deep-learning-for/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Chin‐Yi Lin,Tzu-Liang Tseng,Tsung-Han Tsai |
| Citations | 13 |
| DOI | 10.1109/access.2025.3551332 |
| Fields | Engineering |
| Open Access | true |
| OA Status | gold |
| OA URL | https://doi.org/10.1109/access.2025.3551332 |
| OpenAlex ID | https://openalex.org/W4408441342 |
| Type | article |
| Year | 2025 |

## Paper authors

- [Tsung-Han Tsai](https://scholariq.org/researchers/tsung-han-tsai/)

## Paper journal

- [IEEE Access](https://scholariq.org/journals/ieee-access/)

## Paper primary topic

- [Digital Transformation in Industry](https://scholariq.org/topics/digital-transformation-in-industry/)

## Paper topics

- [Digital Transformation in Industry](https://scholariq.org/topics/digital-transformation-in-industry/)
- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)
- [Flexible and Reconfigurable Manufacturing Systems](https://scholariq.org/topics/flexible-and-reconfigurable-manufacturing-systems/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.