# A hybrid feature selection approach for virtual metrology: Application to CMP process

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/a-hybrid-feature-selection-approach-for-virtual-metrology-application-to-cmp/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Taki Eddine Korabi,Valeria Borodin,Michel Juge,Agnès Roussy |
| Citations | 7 |
| DOI | 10.1109/asmc51741.2021.9435673 |
| Fields | Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W3165015389 |
| Type | conference-paper |
| Year | 2021 |

## Paper authors

- [Michel Juge](https://scholariq.org/researchers/michel-juge/)

## Paper primary topic

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)

## Paper topics

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)
- [Advanced Surface Polishing Techniques](https://scholariq.org/topics/advanced-surface-polishing-techniques/)
- [Advanced Measurement and Metrology Techniques](https://scholariq.org/topics/advanced-measurement-and-metrology-techniques/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.