# A Low-Cost Hands-On Laboratory to Introduce Lithography Concepts

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/a-low-cost-hands-on-laboratory-to-introduce-lithography-concepts/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Maryam Jalali,James Marti,Allison Kirchhoff,Frances Lawrenz,Stephen A. Campbell |
| Citations | 10 |
| DOI | 10.1109/te.2012.2192442 |
| Fields | Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W1983812846 |
| Type | article |
| Year | 2012 |

## Paper authors

- [Allison Kirchhoff](https://scholariq.org/researchers/allison-kirchhoff/)

## Paper primary topic

- [Experimental Learning in Engineering](https://scholariq.org/topics/experimental-learning-in-engineering/)

## Paper topics

- [Experimental Learning in Engineering](https://scholariq.org/topics/experimental-learning-in-engineering/)
- [Nanofabrication and Lithography Techniques](https://scholariq.org/topics/nanofabrication-and-lithography-techniques/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.