# A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/a-novel-polishing-method-for-single-crystal-silicon-using-the-cavitation-rotary/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Zhao Jun,E. Y. Jiang,Huan Qi,Shiming Ji,Zhenzhen Chen |
| Citations | 89 |
| DOI | 10.1016/j.precisioneng.2019.10.002 |
| Fields | Engineering,Environmental Science,Materials Science |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2977411747 |
| Type | article |
| Year | 2019 |

## Paper authors

- [Shiming Ji](https://scholariq.org/researchers/shiming-ji/)

## Paper primary topic

- [Advanced Surface Polishing Techniques](https://scholariq.org/topics/advanced-surface-polishing-techniques/)

## Paper topics

- [Advanced Surface Polishing Techniques](https://scholariq.org/topics/advanced-surface-polishing-techniques/)
- [Erosion and Abrasive Machining](https://scholariq.org/topics/erosion-and-abrasive-machining/)
- [Diamond and Carbon-based Materials Research](https://scholariq.org/topics/diamond-and-carbon-based-materials-research/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.