# A physics-informed Run-to-Run control framework for semiconductor manufacturing

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/a-physics-informed-run-to-run-control-framework-for-semiconductor-manufacturing/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Wei-Ting Yang,Jakey Blue,Agnès Roussy,Jacques Pinaton,Marco S. Reis |
| Citations | 22 |
| DOI | 10.1016/j.eswa.2020.113424 |
| Fields | Decision Sciences,Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W3020982770 |
| Type | article |
| Year | 2020 |

## Paper authors

- [Wei-Ting Yang](https://scholariq.org/researchers/wei-ting-yang/)
- [Agnès Roussy](https://scholariq.org/researchers/agnes-roussy/)

## Paper journal

- [Expert Systems with Applications](https://scholariq.org/journals/expert-systems-with-applications/)

## Paper primary topic

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)

## Paper topics

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)
- [Fault Detection and Control Systems](https://scholariq.org/topics/fault-detection-and-control-systems/)
- [Advanced Statistical Process Monitoring](https://scholariq.org/topics/advanced-statistical-process-monitoring/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.