# Advanced run-to-run controller in semiconductor manufacturing with real-time equipment condition: APC: Advanced process control; AM: Advanced metrology

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/advanced-run-to-run-controller-in-semiconductor-manufacturing-with-real-time/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Wei-Ting Yang,Jakey Blue,Agnès Roussy,Marco S. Reis,Jacques Pinaton |
| Citations | 3 |
| DOI | 10.1109/asmc.2018.8373161 |
| Fields | Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2807951467 |
| Type | conference-paper |
| Year | 2018 |

## Paper authors

- [Wei-Ting Yang](https://scholariq.org/researchers/wei-ting-yang/)

## Paper primary topic

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)

## Paper topics

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)
- [Mineral Processing and Grinding](https://scholariq.org/topics/mineral-processing-and-grinding/)
- [Advanced Surface Polishing Techniques](https://scholariq.org/topics/advanced-surface-polishing-techniques/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.