# Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/aluminum-oxide-from-trimethylaluminum-and-water-by-atomic-layer-deposition-the/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Oili Ylivaara,Xuwen Liu,Lauri Kilpi,Jussi Lyytinen,Dieter Schneider,Mikko Laitinen,Jaakko Julin,Saima Ali,Sakari Sintonen,Maria Berdova,Eero Haimi,Timo Sajavaara,Helena Ronkainen,Harri Lipsanen,Jari Koskinen,Simo‐Pekka Hannula,Riikka L. Puurunen |
| Citations | 189 |
| DOI | 10.1016/j.tsf.2013.11.112 |
| Fields | Engineering,Physics and Astronomy |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2093418857 |
| Type | article |
| Year | 2013 |

## Paper authors

- [Helena Ronkainen](https://scholariq.org/researchers/helena-ronkainen/)
- [Lauri Kilpi](https://scholariq.org/researchers/lauri-kilpi/)

## Paper primary topic

- [Semiconductor materials and devices](https://scholariq.org/topics/semiconductor-materials-and-devices/)

## Paper topics

- [Semiconductor materials and devices](https://scholariq.org/topics/semiconductor-materials-and-devices/)
- [Metal and Thin Film Mechanics](https://scholariq.org/topics/metal-and-thin-film-mechanics/)
- [GaN-based semiconductor devices and materials](https://scholariq.org/topics/gan-based-semiconductor-devices-and-materials/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.