# Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/aluminum-oxide-titanium-dioxide-nanolaminates-grown-by-atomic-layer-deposition/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Oili Ylivaara,Lauri Kilpi,Xuwen Liu,Sakari Sintonen,Saima Ali,Mikko Laitinen,Jaakko Julin,Eero Haimi,Timo Sajavaara,Harri Lipsanen,Simo‐Pekka Hannula,Helena Ronkainen,Riikka L. Puurunen |
| Citations | 56 |
| DOI | 10.1116/1.4966198 |
| Fields | Engineering,Materials Science |
| Open Access | true |
| OA Status | bronze |
| OA URL | https://avs.scitation.org/doi/pdf/10.1116/1.4966198 |
| OpenAlex ID | https://openalex.org/W2548089883 |
| Type | article |
| Year | 2016 |

## Paper authors

- [Lauri Kilpi](https://scholariq.org/researchers/lauri-kilpi/)

## Paper primary topic

- [Semiconductor materials and devices](https://scholariq.org/topics/semiconductor-materials-and-devices/)

## Paper topics

- [Semiconductor materials and devices](https://scholariq.org/topics/semiconductor-materials-and-devices/)
- [Electronic and Structural Properties of Oxides](https://scholariq.org/topics/electronic-and-structural-properties-of-oxides/)
- [Diamond and Carbon-based Materials Research](https://scholariq.org/topics/diamond-and-carbon-based-materials-research/)

---
Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.