# Bayesian Belief Network-based approach for diagnostics and prognostics of semiconductor manufacturing systems

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/bayesian-belief-network-based-approach-for-diagnostics-and-prognostics-of/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Lei Yang,Jay Lee |
| Citations | 96 |
| DOI | 10.1016/j.rcim.2011.06.007 |
| Fields | Decision Sciences,Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2027330308 |
| Type | article |
| Year | 2011 |

## Paper authors

- [Lei Yang](https://scholariq.org/researchers/lei-yang/)
- [Jay Lee](https://scholariq.org/researchers/jay-lee/)

## Paper journal

- [Robotics and Computer-Integrated Manufacturing](https://scholariq.org/journals/robotics-and-computer-integrated-manufacturing/)

## Paper primary topic

- [Fault Detection and Control Systems](https://scholariq.org/topics/fault-detection-and-control-systems/)

## Paper topics

- [Fault Detection and Control Systems](https://scholariq.org/topics/fault-detection-and-control-systems/)
- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)
- [Advanced Statistical Process Monitoring](https://scholariq.org/topics/advanced-statistical-process-monitoring/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.