# Contact Mechanics and Lubrication Hydrodynamics of Chemical Mechanical Polishing

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/contact-mechanics-and-lubrication-hydrodynamics-of-chemical-mechanical-polishing/

## Facts

| Field | Value |
| --- | --- |
| Author Names | John Tichy,Joseph A. Levert,Lei Shan,S. Danyluk |
| Citations | 152 |
| DOI | 10.1149/1.1391798 |
| Fields | Engineering |
| Open Access | true |
| OA Status | bronze |
| OA URL | https://iopscience.iop.org/article/10.1149/1.1391798/pdf |
| OpenAlex ID | https://openalex.org/W2027558267 |
| Type | article |
| Year | 1999 |

## Paper authors

- [S. Danyluk](https://scholariq.org/researchers/s-danyluk/)

## Paper primary topic

- [Advanced Surface Polishing Techniques](https://scholariq.org/topics/advanced-surface-polishing-techniques/)

## Paper topics

- [Advanced Surface Polishing Techniques](https://scholariq.org/topics/advanced-surface-polishing-techniques/)
- [Advanced machining processes and optimization](https://scholariq.org/topics/advanced-machining-processes-and-optimization/)
- [Adhesion, Friction, and Surface Interactions](https://scholariq.org/topics/adhesion-friction-and-surface-interactions/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.