# Data-Driven Adaptive Virtual Metrology for Yield Prediction in Multibatch Wafers

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/data-driven-adaptive-virtual-metrology-for-yield-prediction-in-multibatch-wafers/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Hongwei Xu,Wei Qin,Youlong Lv,Jie Zhang |
| Citations | 38 |
| DOI | 10.1109/tii.2022.3162268 |
| Fields | Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W4221023955 |
| Type | article |
| Year | 2022 |

## Paper authors

- [Hongwei Xu](https://scholariq.org/researchers/hongwei-xu/)

## Paper primary topic

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)

## Paper topics

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)
- [Image Processing Techniques and Applications](https://scholariq.org/topics/image-processing-techniques-and-applications/)
- [Surface Roughness and Optical Measurements](https://scholariq.org/topics/surface-roughness-and-optical-measurements/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.