# Deep learning-based detection, classification, and localization of defects in semiconductor processes

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/deep-learning-based-detection-classification-and-localization-of-defects-in/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Dhruv Patel,Ravi Bonam,Assad A. Oberai |
| Citations | 25 |
| DOI | 10.1117/1.jmm.19.2.024801 |
| Fields | Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W3020045356 |
| Type | article |
| Year | 2020 |

## Paper authors

- [Dhruv Patel](https://scholariq.org/researchers/dhruv-patel/)

## Paper journal

- [Journal of Micro/Nanolithography MEMS and MOEMS](https://scholariq.org/journals/journal-of-micro-nanolithography-mems-and-moems/)

## Paper primary topic

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)

## Paper topics

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)
- [Integrated Circuits and Semiconductor Failure Analysis](https://scholariq.org/topics/integrated-circuits-and-semiconductor-failure-analysis/)
- [Advancements in Photolithography Techniques](https://scholariq.org/topics/advancements-in-photolithography-techniques/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.