# Diagnostics of a Multicusp-Assisted Inductively-Coupled Radio-Frequency Plasma Source for Plasma Immersion Ion Implantation

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/diagnostics-of-a-multicusp-assisted-inductively-coupled-radio-frequency-plasma-2/

## Facts

| Field | Value |
| --- | --- |
| Author Names | M. E. Joël,Jimenez Marilyn,O. Daniel,Bradley Michael P.,Couëdel Lénaïc |
| Citations | 0 |
| DOI | 10.46298/ops.16754 |
| Fields | Engineering,Physics and Astronomy |
| Open Access | true |
| OA Status | hybrid |
| OA URL | https://doi.org/10.46298/ops.16754 |
| OpenAlex ID | https://openalex.org/W7125673154 |
| Type | article |
| Year | 2026 |

## Paper authors

- [M. E. Joël](https://scholariq.org/researchers/m-e-joel/)

## Paper journal

- [Open Plasma Science](https://scholariq.org/journals/open-plasma-science/)

## Paper primary topic

- [Plasma Diagnostics and Applications](https://scholariq.org/topics/plasma-diagnostics-and-applications/)

## Paper topics

- [Plasma Diagnostics and Applications](https://scholariq.org/topics/plasma-diagnostics-and-applications/)
- [Metal and Thin Film Mechanics](https://scholariq.org/topics/metal-and-thin-film-mechanics/)
- [Vacuum and Plasma Arcs](https://scholariq.org/topics/vacuum-and-plasma-arcs/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.