# Dry etch challenges for CD shrinkage in memory process

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/dry-etch-challenges-for-cd-shrinkage-in-memory-process/

## Facts

| Field | Value |
| --- | --- |
| Author Names | T. Matsushita,Takanori Matsumoto,Hidefumi Mukai,Suigen Kyoh,Kohji Hashimoto |
| Citations | 6 |
| DOI | 10.1117/12.2085628 |
| Fields | Engineering,Materials Science |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2052537852 |
| Type | conference-paper |
| Year | 2015 |

## Paper authors

- [T. Matsushita](https://scholariq.org/researchers/t-matsushita/)

## Paper journal

- [Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE](https://scholariq.org/journals/proceedings-of-spie-the-international-society-for-optical-engineering/)

## Paper primary topic

- [Copper Interconnects and Reliability](https://scholariq.org/topics/copper-interconnects-and-reliability/)

## Paper topics

- [Copper Interconnects and Reliability](https://scholariq.org/topics/copper-interconnects-and-reliability/)
- [Advancements in Photolithography Techniques](https://scholariq.org/topics/advancements-in-photolithography-techniques/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.