# EUV for HVM: towards an industrialized scanner for HVM NXE3400B performance update

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/euv-for-hvm-towards-an-industrialized-scanner-for-hvm-nxe3400b-performance/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Mark van de Kerkhof,Arthur Minnaert,Marco Pieters,H. Meiling,Joost Smits,Rudy Peeters,Roderik van Es,Geert Fisser,Jos W. de Klerk,Roel Moors,Eric Verhoeven,Leon Levasier |
| Citations | 44 |
| DOI | 10.1117/12.2299503 |
| Fields | Engineering,Materials Science |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2792402902 |
| Type | conference-paper |
| Year | 2018 |

## Paper authors

- [Eric Verhoeven](https://scholariq.org/researchers/eric-verhoeven/)

## Paper primary topic

- [Advancements in Photolithography Techniques](https://scholariq.org/topics/advancements-in-photolithography-techniques/)

## Paper topics

- [Advancements in Photolithography Techniques](https://scholariq.org/topics/advancements-in-photolithography-techniques/)
- [Integrated Circuits and Semiconductor Failure Analysis](https://scholariq.org/topics/integrated-circuits-and-semiconductor-failure-analysis/)
- [Electron and X-Ray Spectroscopy Techniques](https://scholariq.org/topics/electron-and-x-ray-spectroscopy-techniques/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.