# EUV lithography performance for manufacturing: status and outlook

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/euv-lithography-performance-for-manufacturing-status-and-outlook/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Alberto Pirati,Rudy Peeters,Daniel Smith,Sjoerd Lok,Martijn van Noordenburg,Roderik van Es,Eric Verhoeven,H.C. Meijer,Arthur Minnaert,Jan-Willem van der Horst,H. Meiling,Joerg Mallmann,Christian Wagner,Judon Stoeldraijer,Geert Fisser,Jo Finders,Carmen Zoldesi,Uwe Stamm,H.B.K. Boom,David C. Brandt,Daniel J. Brown,Igor V. Fomenkov,Michael Purvis |
| Citations | 90 |
| DOI | 10.1117/12.2220423 |
| Fields | Engineering,Materials Science |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2301221560 |
| Type | conference-paper |
| Year | 2016 |

## Paper authors

- [Eric Verhoeven](https://scholariq.org/researchers/eric-verhoeven/)

## Paper journal

- [Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE](https://scholariq.org/journals/proceedings-of-spie-the-international-society-for-optical-engineering/)

## Paper primary topic

- [Advancements in Photolithography Techniques](https://scholariq.org/topics/advancements-in-photolithography-techniques/)

## Paper topics

- [Advancements in Photolithography Techniques](https://scholariq.org/topics/advancements-in-photolithography-techniques/)
- [Integrated Circuits and Semiconductor Failure Analysis](https://scholariq.org/topics/integrated-circuits-and-semiconductor-failure-analysis/)
- [Electron and X-Ray Spectroscopy Techniques](https://scholariq.org/topics/electron-and-x-ray-spectroscopy-techniques/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.