# Fabrication and analysis of high-performance piezoelectric MEMS generators

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/fabrication-and-analysis-of-high-performance-piezoelectric-mems-generators/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Gang Tang,Jingquan Liu,Bin Yang,Jiangbo Luo,Hesheng Liu,Yigui Li,Chunsheng Yang,Dannong He,Dzung Viet Dao,Katsuhiko Tanaka,Susumu Sugiyama |
| Citations | 58 |
| DOI | 10.1088/0960-1317/22/6/065017 |
| Fields | Engineering |
| Open Access | true |
| OA Status | bronze |
| OA URL | https://iopscience.iop.org/article/10.1088/0960-1317/22/6/065017/pdf |
| OpenAlex ID | https://openalex.org/W2038832840 |
| Type | article |
| Year | 2012 |

## Paper authors

- [Gang Tang](https://scholariq.org/researchers/gang-tang/)

## Paper primary topic

- [Innovative Energy Harvesting Technologies](https://scholariq.org/topics/innovative-energy-harvesting-technologies/)

## Paper topics

- [Innovative Energy Harvesting Technologies](https://scholariq.org/topics/innovative-energy-harvesting-technologies/)
- [Advanced Sensor and Energy Harvesting Materials](https://scholariq.org/topics/advanced-sensor-and-energy-harvesting-materials/)
- [Energy Harvesting in Wireless Networks](https://scholariq.org/topics/energy-harvesting-in-wireless-networks/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.