# Fabrication of Capacitive Micromachined Ultrasonic Transducer Arrays With Isolation Trenches Using Anodic Wafer Bonding

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/fabrication-of-capacitive-micromachined-ultrasonic-transducer-arrays-with/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Ravindra Mukhiya,Aditi Aditi,K. Prabakar,M. Raghuramaiah,J. Jayapandian,Ram Gopal,Vinod Kumar Khanna,Chandra Shekhar |
| Citations | 28 |
| DOI | 10.1109/jsen.2015.2437394 |
| Fields | Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W1485887211 |
| Type | article |
| Year | 2015 |

## Paper authors

- [J. Jayapandian](https://scholariq.org/researchers/j-jayapandian/)

## Paper journal

- [IEEE Sensors Journal](https://scholariq.org/journals/ieee-sensors-journal/)

## Paper primary topic

- [Advanced MEMS and NEMS Technologies](https://scholariq.org/topics/advanced-mems-and-nems-technologies/)

## Paper topics

- [Advanced MEMS and NEMS Technologies](https://scholariq.org/topics/advanced-mems-and-nems-technologies/)
- [Advanced Sensor and Energy Harvesting Materials](https://scholariq.org/topics/advanced-sensor-and-energy-harvesting-materials/)
- [Ultrasonics and Acoustic Wave Propagation](https://scholariq.org/topics/ultrasonics-and-acoustic-wave-propagation/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.