# Field emission of nanostructured amorphous SiCN films deposited by reactive magnetron sputtering of SiC in CH4/N2 atmosphere

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/field-emission-of-nanostructured-amorphous-sicn-films-deposited-by-reactive/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Hongfeng Lin,Y.C Chen,Ching‐Wei Lin,Yu Tong,L.G. Hwa,Kuei‐Hsien Chen,Li–Chyong Chen |
| Citations | 25 |
| DOI | 10.1016/s0040-6090(02)00712-5 |
| Fields | Engineering,Materials Science |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2080675093 |
| Type | article |
| Year | 2002 |

## Paper authors

- [Ching‐Wei Lin](https://scholariq.org/researchers/ching-wei-lin/)

## Paper primary topic

- [Diamond and Carbon-based Materials Research](https://scholariq.org/topics/diamond-and-carbon-based-materials-research/)

## Paper topics

- [Diamond and Carbon-based Materials Research](https://scholariq.org/topics/diamond-and-carbon-based-materials-research/)
- [Semiconductor materials and devices](https://scholariq.org/topics/semiconductor-materials-and-devices/)
- [Metal and Thin Film Mechanics](https://scholariq.org/topics/metal-and-thin-film-mechanics/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.