# Formation of Cubic Boron Nitride Films on Diamond by Plasma CVD Technique

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/formation-of-cubic-boron-nitride-films-on-diamond-by-plasma-cvd-technique/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Masaki Okamoto,Yoshiharu Utsumi,Yukio Ôsaka |
| Citations | 52 |
| DOI | 10.1143/jjap.29.l1004 |
| Fields | Engineering,Materials Science |
| Open Access | true |
| OA Status | bronze |
| OA URL | https://iopscience.iop.org/article/10.1143/JJAP.29.L1004/pdf |
| OpenAlex ID | https://openalex.org/W2010802086 |
| Type | article |
| Year | 1990 |

## Paper authors

- [Yoshiharu Utsumi](https://scholariq.org/researchers/yoshiharu-utsumi/)

## Paper primary topic

- [Diamond and Carbon-based Materials Research](https://scholariq.org/topics/diamond-and-carbon-based-materials-research/)

## Paper topics

- [Diamond and Carbon-based Materials Research](https://scholariq.org/topics/diamond-and-carbon-based-materials-research/)
- [Boron and Carbon Nanomaterials Research](https://scholariq.org/topics/boron-and-carbon-nanomaterials-research/)
- [Semiconductor materials and devices](https://scholariq.org/topics/semiconductor-materials-and-devices/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.