# Gamma-ray-irradiation effects on the leakage current and reliability of sputtered TiO2 gate oxide in metal–oxide–semiconductor capacitors

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/gamma-ray-irradiation-effects-on-the-leakage-current-and-reliability-of/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Ching-Wu Wang,Shih‐Fang Chen,Guan-Ting Chen |
| Citations | 39 |
| DOI | 10.1063/1.1473668 |
| Fields | Engineering,Physics and Astronomy |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2007995891 |
| Type | article |
| Year | 2002 |

## Paper authors

- [Shih‐Fang Chen](https://scholariq.org/researchers/shih-fang-chen/)

## Paper primary topic

- [Semiconductor materials and devices](https://scholariq.org/topics/semiconductor-materials-and-devices/)

## Paper topics

- [Semiconductor materials and devices](https://scholariq.org/topics/semiconductor-materials-and-devices/)
- [Semiconductor materials and interfaces](https://scholariq.org/topics/semiconductor-materials-and-interfaces/)
- [Ferroelectric and Negative Capacitance Devices](https://scholariq.org/topics/ferroelectric-and-negative-capacitance-devices/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.