# Generative AI-Driven Data Augmentation for Robust Virtual Metrology: GANs, VAEs, and Diffusion Models

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/generative-ai-driven-data-augmentation-for-robust-virtual-metrology-gans-vaes/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Chin‐Yi Lin,Tzu-Liang Tseng,Solayman Hossain Emon,Tsung-Han Tsai |
| Citations | 9 |
| DOI | 10.1109/tsm.2025.3569229 |
| Fields | Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W4410294934 |
| Type | article |
| Year | 2025 |

## Paper authors

- [Tsung-Han Tsai](https://scholariq.org/researchers/tsung-han-tsai/)

## Paper primary topic

- [Manufacturing Process and Optimization](https://scholariq.org/topics/manufacturing-process-and-optimization/)

## Paper topics

- [Manufacturing Process and Optimization](https://scholariq.org/topics/manufacturing-process-and-optimization/)
- [Advanced Measurement and Metrology Techniques](https://scholariq.org/topics/advanced-measurement-and-metrology-techniques/)

---
Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.