# Highly uniform growth of 2-inch GaN wafers with a multi-wafer HVPE system

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/highly-uniform-growth-of-2-inch-gan-wafers-with-a-multi-wafer-hvpe-system/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Nanliu Liu,Jiejun Wu,Wenhui Li,Ruihong Luo,Yuzhen Tong,Guoyi Zhang |
| Citations | 23 |
| DOI | 10.1016/j.jcrysgro.2013.11.023 |
| Fields | Engineering,Materials Science,Physics and Astronomy |
| Open Access | true |
| OA Status | hybrid |
| OA URL | https://www.sciencedirect.com/science/article/pii/S0022024813007756/pdf |
| OpenAlex ID | https://openalex.org/W2015574289 |
| Type | article |
| Year | 2013 |

## Paper authors

- [Wenhui Li](https://scholariq.org/researchers/wenhui-li/)

## Paper primary topic

- [GaN-based semiconductor devices and materials](https://scholariq.org/topics/gan-based-semiconductor-devices-and-materials/)

## Paper topics

- [GaN-based semiconductor devices and materials](https://scholariq.org/topics/gan-based-semiconductor-devices-and-materials/)
- [ZnO doping and properties](https://scholariq.org/topics/zno-doping-and-properties/)
- [Metal and Thin Film Mechanics](https://scholariq.org/topics/metal-and-thin-film-mechanics/)

---
Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.