# Influence of Colloidal Abrasive Size on Material Removal Rate and Surface Finish in SiO<sub>2</sub>Chemical Mechanical Polishing

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/influence-of-colloidal-abrasive-size-on-material-removal-rate-and-surface-finish/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Chunhong Zhou,Lei Shan,J. Robert Hight,S. Danyluk,Sum Huan Ng,Andrew. J. Paszkowski |
| Citations | 93 |
| DOI | 10.1080/10402000208982545 |
| Fields | Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2076501399 |
| Type | article |
| Year | 2002 |

## Paper authors

- [S. Danyluk](https://scholariq.org/researchers/s-danyluk/)

## Paper journal

- [Tribology Transactions](https://scholariq.org/journals/tribology-transactions/)

## Paper primary topic

- [Advanced Surface Polishing Techniques](https://scholariq.org/topics/advanced-surface-polishing-techniques/)

## Paper topics

- [Advanced Surface Polishing Techniques](https://scholariq.org/topics/advanced-surface-polishing-techniques/)
- [Advanced machining processes and optimization](https://scholariq.org/topics/advanced-machining-processes-and-optimization/)
- [Adhesion, Friction, and Surface Interactions](https://scholariq.org/topics/adhesion-friction-and-surface-interactions/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.