# Interfacial Fluid Mechanics and Pressure Prediction in Chemical Mechanical Polishing

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/interfacial-fluid-mechanics-and-pressure-prediction-in-chemical-mechanical/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Lei Shan,Joseph A. Levert,L. E. Meade,John Tichy,S. Danyluk |
| Citations | 90 |
| DOI | 10.1115/1.555398 |
| Fields | Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2128088017 |
| Type | article |
| Year | 1999 |

## Paper authors

- [S. Danyluk](https://scholariq.org/researchers/s-danyluk/)

## Paper journal

- [Journal of Tribology](https://scholariq.org/journals/journal-of-tribology/)

## Paper primary topic

- [Advanced Surface Polishing Techniques](https://scholariq.org/topics/advanced-surface-polishing-techniques/)

## Paper topics

- [Advanced Surface Polishing Techniques](https://scholariq.org/topics/advanced-surface-polishing-techniques/)
- [Adhesion, Friction, and Surface Interactions](https://scholariq.org/topics/adhesion-friction-and-surface-interactions/)
- [Advanced machining processes and optimization](https://scholariq.org/topics/advanced-machining-processes-and-optimization/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.