# Large Pre-Trained Models and Few-Shot Fine-Tuning for Virtual Metrology: A Framework for Uncertainty-Driven Adaptive Process Control in Semiconductor Manufacturing

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/large-pre-trained-models-and-few-shot-fine-tuning-for-virtual-metrology-a/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Chin‐Yi Lin,Tzu-Liang Tseng,Solayman Hossain Emon,Tsung-Han Tsai |
| Citations | 4 |
| DOI | 10.1109/tase.2025.3568010 |
| Fields | Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W4410204361 |
| Type | article |
| Year | 2025 |

## Paper authors

- [Tsung-Han Tsai](https://scholariq.org/researchers/tsung-han-tsai/)

## Paper primary topic

- [Manufacturing Process and Optimization](https://scholariq.org/topics/manufacturing-process-and-optimization/)

## Paper topics

- [Manufacturing Process and Optimization](https://scholariq.org/topics/manufacturing-process-and-optimization/)
- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.