# Lithography for robust and editable atomic-scale silicon devices and memories

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/lithography-for-robust-and-editable-atomic-scale-silicon-devices-and-memories/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Roshan Achal,Mohammad Rashidi,Jeremiah Croshaw,David G. Churchill,Marco Taucer,Taleana Huff,Martin Cloutier,Jason Pitters,Robert A. Wolkow |
| Citations | 127 |
| DOI | 10.1038/s41467-018-05171-y |
| Fields | Engineering,Physics and Astronomy |
| Open Access | true |
| OA Status | gold |
| OA URL | https://www.nature.com/articles/s41467-018-05171-y.pdf |
| OpenAlex ID | https://openalex.org/W2842665777 |
| PMID | 30038236 |
| Type | article |
| Year | 2018 |

## Paper authors

- [Martin Cloutier](https://scholariq.org/researchers/martin-cloutier/)

## Paper journal

- [Nature Communications](https://scholariq.org/journals/nature-communications/)

## Paper primary topic

- [Force Microscopy Techniques and Applications](https://scholariq.org/topics/force-microscopy-techniques-and-applications/)

## Paper topics

- [Force Microscopy Techniques and Applications](https://scholariq.org/topics/force-microscopy-techniques-and-applications/)
- [Molecular Junctions and Nanostructures](https://scholariq.org/topics/molecular-junctions-and-nanostructures/)
- [Nanowire Synthesis and Applications](https://scholariq.org/topics/nanowire-synthesis-and-applications/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.