# Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/mechanical-assessment-of-suspended-ald-thin-films-by-bulge-and-shaft-loading/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Maria Berdova,Tuomo Ylitalo,Ivan Kassamakov,Jouni Heino,P.T. Törmä,Lauri Kilpi,Helena Ronkainen,Jari Koskinen,Edward Hæggström,Sami Franssila |
| Citations | 54 |
| DOI | 10.1016/j.actamat.2013.11.024 |
| Fields | Engineering,Materials Science |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2027168542 |
| Type | article |
| Year | 2013 |

## Paper authors

- [Lauri Kilpi](https://scholariq.org/researchers/lauri-kilpi/)

## Paper primary topic

- [Semiconductor materials and devices](https://scholariq.org/topics/semiconductor-materials-and-devices/)

## Paper topics

- [Semiconductor materials and devices](https://scholariq.org/topics/semiconductor-materials-and-devices/)
- [Metal and Thin Film Mechanics](https://scholariq.org/topics/metal-and-thin-film-mechanics/)
- [Diamond and Carbon-based Materials Research](https://scholariq.org/topics/diamond-and-carbon-based-materials-research/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.