# Mechanical properties of cubic boron nitride film on Si prepared by ECR plasma

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/mechanical-properties-of-cubic-boron-nitride-film-on-si-prepared-by-ecr-plasma/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Masaki Okamoto,Yoshiharu Utsumi,Y. Osaka |
| Citations | 18 |
| DOI | 10.1088/0963-0252/2/1/001 |
| Fields | Engineering,Materials Science |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2047115658 |
| Type | article |
| Year | 1993 |

## Paper authors

- [Yoshiharu Utsumi](https://scholariq.org/researchers/yoshiharu-utsumi/)

## Paper primary topic

- [Boron and Carbon Nanomaterials Research](https://scholariq.org/topics/boron-and-carbon-nanomaterials-research/)

## Paper topics

- [Boron and Carbon Nanomaterials Research](https://scholariq.org/topics/boron-and-carbon-nanomaterials-research/)
- [Metal and Thin Film Mechanics](https://scholariq.org/topics/metal-and-thin-film-mechanics/)
- [Silicon Carbide Semiconductor Technologies](https://scholariq.org/topics/silicon-carbide-semiconductor-technologies/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.