# Mechanisms and reactions during atomic layer deposition on polymers

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/mechanisms-and-reactions-during-atomic-layer-deposition-on-polymers/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Gregory N. Parsons,Sarah E. Atanasov,Erinn C. Dandley,Christina K. Devine,Bo Gong,Jesse S. Jur,Kyoung-Mi Lee,Christopher J. Oldham,Qing Peng,Joseph C. Spagnola,Philip S. Williams |
| Citations | 214 |
| DOI | 10.1016/j.ccr.2013.07.001 |
| Fields | Engineering,Materials Science |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2064219487 |
| Type | article |
| Year | 2013 |

## Paper authors

- [Kyoung-Mi Lee](https://scholariq.org/researchers/kyoung-mi-lee/)

## Paper primary topic

- [Semiconductor materials and devices](https://scholariq.org/topics/semiconductor-materials-and-devices/)

## Paper topics

- [Semiconductor materials and devices](https://scholariq.org/topics/semiconductor-materials-and-devices/)
- [Copper Interconnects and Reliability](https://scholariq.org/topics/copper-interconnects-and-reliability/)
- [Electronic and Structural Properties of Oxides](https://scholariq.org/topics/electronic-and-structural-properties-of-oxides/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.