# Molecular dynamics study on the effects of stamp shape, adhesive energy, and temperature on the nanoimprint lithography process

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/molecular-dynamics-study-on-the-effects-of-stamp-shape-adhesive-energy-and/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Ji-Hoon Kang,Kwang‐Seop Kim,Kyung-Woong Kim |
| Citations | 53 |
| DOI | 10.1016/j.apsusc.2010.08.096 |
| Fields | Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2153284880 |
| Type | article |
| Year | 2010 |

## Paper authors

- [Kyung-Woong Kim](https://scholariq.org/researchers/kyung-woong-kim/)

## Paper primary topic

- [Nanofabrication and Lithography Techniques](https://scholariq.org/topics/nanofabrication-and-lithography-techniques/)

## Paper topics

- [Nanofabrication and Lithography Techniques](https://scholariq.org/topics/nanofabrication-and-lithography-techniques/)
- [Advancements in Photolithography Techniques](https://scholariq.org/topics/advancements-in-photolithography-techniques/)
- [Metal and Thin Film Mechanics](https://scholariq.org/topics/metal-and-thin-film-mechanics/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.