# Multi-Dimensional MEMS/Micro Sensor for Force and Moment Sensing: A Review

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/multi-dimensional-mems-micro-sensor-for-force-and-moment-sensing-a-review/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Qiaokang Liang,Dan Zhang,Gianmarc Coppola,Yaonan Wang,Wei Sun,Yunjian Ge |
| Citations | 80 |
| DOI | 10.1109/jsen.2014.2313860 |
| Fields | Computer Science,Engineering,Physics and Astronomy |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2317036030 |
| Type | article |
| Year | 2014 |

## Paper authors

- [Qiaokang Liang](https://scholariq.org/researchers/qiaokang-liang/)
- [Wei Sun](https://scholariq.org/researchers/wei-sun/)
- [Gianmarc Coppola](https://scholariq.org/researchers/gianmarc-coppola/)

## Paper journal

- [IEEE Sensors Journal](https://scholariq.org/journals/ieee-sensors-journal/)

## Paper primary topic

- [Advanced MEMS and NEMS Technologies](https://scholariq.org/topics/advanced-mems-and-nems-technologies/)

## Paper topics

- [Advanced MEMS and NEMS Technologies](https://scholariq.org/topics/advanced-mems-and-nems-technologies/)
- [Mechanical and Optical Resonators](https://scholariq.org/topics/mechanical-and-optical-resonators/)
- [Sensor Technology and Measurement Systems](https://scholariq.org/topics/sensor-technology-and-measurement-systems/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.