# Multilayer MMIC using a 3 mu m*3-layer dielectric film structure

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/multilayer-mmic-using-a-3-mu-m-3-layer-dielectric-film-structure/

## Facts

| Field | Value |
| --- | --- |
| Author Names | T. Tokumitsu,T. Hiraoka,Hiroyuki Nakamoto,T. Takenaka |
| Citations | 93 |
| DOI | 10.1109/mwsym.1990.99708 |
| Fields | Engineering,Materials Science |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2135863670 |
| Type | conference-paper |
| Year | 2002 |

## Paper authors

- [Hiroyuki Nakamoto](https://scholariq.org/researchers/hiroyuki-nakamoto/)

## Paper primary topic

- [Microwave Engineering and Waveguides](https://scholariq.org/topics/microwave-engineering-and-waveguides/)

## Paper topics

- [Microwave Engineering and Waveguides](https://scholariq.org/topics/microwave-engineering-and-waveguides/)
- [Copper Interconnects and Reliability](https://scholariq.org/topics/copper-interconnects-and-reliability/)
- [Acoustic Wave Resonator Technologies](https://scholariq.org/topics/acoustic-wave-resonator-technologies/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.