# Multiple-surface interferometry of highly reflective wafer by wavelength tuning

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/multiple-surface-interferometry-of-highly-reflective-wafer-by-wavelength-tuning/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Yangjin Kim,Kenichi Hibino,Ryohei Hanayama,Naohiko Sugita,Mamoru Mitsuishi |
| Citations | 75 |
| DOI | 10.1364/oe.22.021145 |
| Fields | Computer Science,Engineering |
| Open Access | true |
| OA Status | gold |
| OA URL | https://doi.org/10.1364/oe.22.021145 |
| OpenAlex ID | https://openalex.org/W2053053137 |
| PMID | 25321495 |
| Type | article |
| Year | 2014 |

## Paper authors

- [Naohiko Sugita](https://scholariq.org/researchers/naohiko-sugita/)

## Paper primary topic

- [Optical measurement and interference techniques](https://scholariq.org/topics/optical-measurement-and-interference-techniques/)

## Paper topics

- [Optical measurement and interference techniques](https://scholariq.org/topics/optical-measurement-and-interference-techniques/)
- [Surface Roughness and Optical Measurements](https://scholariq.org/topics/surface-roughness-and-optical-measurements/)
- [Advanced Measurement and Metrology Techniques](https://scholariq.org/topics/advanced-measurement-and-metrology-techniques/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.