# 極薄膜NO Oxynitrideゲート絶縁膜とNi SALICIDEプロセスを用いた高性能35nmゲート長CMOS

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/no-oxynitride-ni-salicide-35nm-cmos/

## Facts

| Field | Value |
| --- | --- |
| Author Names | 聡 稲葉,王俊 岡野,聡 松田,実 藤原,明 外園,甘奈 安達,和也 大内,裕之 須藤,大伸 福井,敬 清水,伸二 森,英樹 小熊,篤 村越,孝治 井谷,俊彦 飯沼,知靖 工藤,英紀 柴田,修一 谷口,T. Matsushita,俊幸 馬越,由美 渡辺,万里子 高柳,篤志 東,尚人 親松,恭一 須黒,康弘 勝又,義明 豊島,秀美 石内 |
| Citations | 0 |
| DOI | 10.1111/eci.13007 |
| Fields | Medicine |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W30054920 |
| Type | article |
| Year | 2002 |

## Paper authors

- [聡 稲葉](https://scholariq.org/researchers/a5078186687/)
- [修一 谷口](https://scholariq.org/researchers/a5053629509/)
- [裕之 須藤](https://scholariq.org/researchers/a5025120713/)
- [T. Matsushita](https://scholariq.org/researchers/t-matsushita/)
- [聡 松田](https://scholariq.org/researchers/a5049136876/)

## Paper journal

- [SIAM International Conference on Data Mining](https://scholariq.org/journals/siam-international-conference-on-data-mining/)

## Paper primary topic

- [Diabetes Treatment and Management](https://scholariq.org/topics/diabetes-treatment-and-management/)

## Paper topics

- [Diabetes Treatment and Management](https://scholariq.org/topics/diabetes-treatment-and-management/)
- [Cardiovascular Function and Risk Factors](https://scholariq.org/topics/cardiovascular-function-and-risk-factors/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.