# Piezoelectric thin films for MEMS

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/piezoelectric-thin-films-for-mems/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Isaku Kanno,Jun Ouyang,Jun Akedo,Takeshi Yoshimura,Barbara Malič,Paul Muralt |
| Citations | 153 |
| DOI | 10.1063/5.0146681 |
| Fields | Engineering,Materials Science |
| Open Access | true |
| OA Status | bronze |
| OA URL | https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/5.0146681/16783720/090401_1_online.pdf |
| OpenAlex ID | https://openalex.org/W4322734432 |
| Type | article |
| Year | 2023 |

## Paper authors

- [Jun Ouyang](https://scholariq.org/researchers/jun-ouyang/)

## Paper primary topic

- [Acoustic Wave Resonator Technologies](https://scholariq.org/topics/acoustic-wave-resonator-technologies/)

## Paper topics

- [Acoustic Wave Resonator Technologies](https://scholariq.org/topics/acoustic-wave-resonator-technologies/)
- [Ferroelectric and Piezoelectric Materials](https://scholariq.org/topics/ferroelectric-and-piezoelectric-materials/)
- [Gas Sensing Nanomaterials and Sensors](https://scholariq.org/topics/gas-sensing-nanomaterials-and-sensors/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.