# Rapid characterization and modeling of pattern-dependent variation in chemical-mechanical polishing

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/rapid-characterization-and-modeling-of-pattern-dependent-variation-in-chemical/

## Facts

| Field | Value |
| --- | --- |
| Author Names | B.E. Stine,Dennis O. Ouma,R. Divecha,Duane S. Boning,J.E. Chung,Dale L. Hetherington,C.R. Harwoo,O.S. Nakagawa,Soo‐Young Oh |
| Citations | 139 |
| DOI | 10.1109/66.661292 |
| Fields | Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2123131789 |
| Type | article |
| Year | 1998 |

## Paper authors

- [Soo‐Young Oh](https://scholariq.org/researchers/soo-young-oh/)

## Paper primary topic

- [Advanced Surface Polishing Techniques](https://scholariq.org/topics/advanced-surface-polishing-techniques/)

## Paper topics

- [Advanced Surface Polishing Techniques](https://scholariq.org/topics/advanced-surface-polishing-techniques/)
- [Advanced machining processes and optimization](https://scholariq.org/topics/advanced-machining-processes-and-optimization/)
- [Integrated Circuits and Semiconductor Failure Analysis](https://scholariq.org/topics/integrated-circuits-and-semiconductor-failure-analysis/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.