# Recent advances in modulated pulsed power magnetron sputtering for surface engineering

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/recent-advances-in-modulated-pulsed-power-magnetron-sputtering-for-surface/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Jianliang Lin,William D. Sproul,John J. Moore,Zhili Wu,Sabrina Lee,Roman Chistyakov,B. Abraham |
| Citations | 99 |
| DOI | 10.1007/s11837-011-0092-4 |
| Fields | Engineering,Materials Science |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W1985639844 |
| Type | article |
| Year | 2011 |

## Paper authors

- [Sabrina Lee](https://scholariq.org/researchers/sabrina-lee/)

## Paper journal

- [JOM](https://scholariq.org/journals/jom/)

## Paper primary topic

- [Metal and Thin Film Mechanics](https://scholariq.org/topics/metal-and-thin-film-mechanics/)

## Paper topics

- [Metal and Thin Film Mechanics](https://scholariq.org/topics/metal-and-thin-film-mechanics/)
- [Diamond and Carbon-based Materials Research](https://scholariq.org/topics/diamond-and-carbon-based-materials-research/)
- [Semiconductor materials and devices](https://scholariq.org/topics/semiconductor-materials-and-devices/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.